Secondary Electron Detection Efficiency for Magnetic Lenses with a Retarding Electrostatic Field

スポンサーリンク

概要

• 論文の詳細を見る
• Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
• 1996-10-01

著者

• SHIMIZU Hiroyasu

  2nd Development Department, IC Equipment Division, Nikon Corporation

• Nakasuji Mamoru

  2nd Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation

• Shimizu Hiroyasu

  2nd Designing Department Ic & Lcd Equipment Division Ohi Plant Nikon Corporation

関連論文

• Electron Optics Properties of Electron Beam Stepper
• Symmetric Magnetic Doublet Optics with Dynamically Compensated Field Aberration for Reducing Image Projection System
• Optimization of Object-Image Distance for Aberration and Space-Charge Effect in Symmetric Magnetic Doublet with Dynamically Compensated Field Aberrations
• Secondary Electron Detection Efficiency for Magnetic Lenses with a Retarding Electrostatic Field
• Electron Optics Properties of Electron Beam Stepper

スポンサーリンク