Novel a-SiC/a-Si Heterojunction Filter with Twin-Wavelength Tunability

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概要

• 論文の詳細を見る

• A novel a-SiC/a-Si heterojunction filter with twin-wavelength tunability has been developed successfully by plasma-enhanced chemical vapor deposition (PECVD) system. Using i-a-SiC:H to absorb blue light and i-a-Si:H to absorb red light, the device is able to simultaneously detect two different wavelengths of light. The peak response wavelengths are 630 nm and 450 nm. In addition, utilizing different contact electrodes and various values of reverse bias, the diode can also detect only blue light or only red light. Thus the a-SiC/a-Si heterojunction filter is a good candidate for optoelectronic integrated circuit (OEIC) applications, such as color image sensors and twin-wavelength photodetectors.

• 社団法人応用物理学会の論文
• 1995-04-15

著者

• Fang Yean

  Vlsi Technology Laboratory Department Of Electrical Engineering National Cheng Kuang University

• Lee Kuen-hsien

  Vlsi Technology Laboratory Department Of Electrical Engineering National Cheng Kung University

• Fang Yeau-kuen

  Vlsi Technology Laboratory Department Of Electrical Engineering National Cheng Kuang University

• KUO Lee-Ching

  Material Research Laboratories, Industrial Technology Research Institute

• Kuo Lee-ching

  Material Research Laboratories Industrial Technology Research Institute

• Chiou Yih-Jen

  VLSI Technology Laboratory Department of Electrical Engineering, National Cheng Kung University

• Chiou Yih-jen

  Vlsi Technology Laboratory Department Of Electrical Engineering National Cheng Kung University

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• Novel Amorphous-Silicon-Based Double-Metal Antifuse with Barrier Enhancement Layer
• Novel Amorphous-Crystallime Silicon Heterojunction Switching Devices with Bidirectional Switching Characteristics
• Novel Amorphous-Silicon-Based Light Converter
• Novel a-SiC/a-Si Heterojunction Filter with Twin-Wavelength Tunability

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