Study of Scratch-Induced Mechanical Damage on Silicon (111) Surfaces

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-03-15

著者

• Iizuka T

  The Electrotechnical Laboratory:(present Address)the University Of Aizu

• IIZUKA Takashi

  The Electrotechnical Laboratory

• OKADA Yasumasa

  The Electrotechnical Laboratory

関連論文

• Study of Scratch-Induced Mechanical Damage on Silicon (111) Surfaces
• Direct Observation of Growth Striations in a Liquid Encapusulated Czochralski GaP Crystal by Light Scattering Method
• Asymmetry in Indentation-Induced Mechanical Damage on Si (111) Surfaces
• Infrared and X-Ray Observation of Copper Extraction from Copper Decorated Dislocations in Silicon Crystal

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