The Characteristics of Al-Al_2O_3-Si Structures Formed by Reactive Suttering
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1968-11-05
著者
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Tanaka Toshio
Faculty Of Engineering Gifu University
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Tanaka Toshio
Faculty Of Science And Technology Department Of Electrical And Electronicengineering Sophia Universi
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Iwauchi Shigeki
Faculty Of Science And Technology Department Of Electrical And Electronicengineering Sophia Universi
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