Consistent Theory of Sputtering of Solid Targets by Ion Bombardment Using Power Potential Law

概要

論文の詳細を見る
Starting from a simple atomic model by Lindhard giving a power potential between ions and atoms as V(r)=z_1z_2e^2a^<n-1>, we assumed that the first collision with a metal atom is of the weakly screened type (n=2) or Rutherford type (n=1) and that subsequent collisions of displaced atoms are similar to collisions of hard spheres (n=5). On this basis, consistent expressions were obtained for the maximum yield S_<max> with the corresponding energy E_m for n=2, and the universal curve of yield-energy, which on the number of atms in the target materials per unit volume N, the effective atomic radius a and the displacement energy E_d. The results were in good agreement with experiments over the energy range from 50 eV to 500 keV.
社団法人応用物理学会の論文
1973-09-05