High Resolution and Spectroscopic Cathodoluminescent Images in Scanning Electron Microscope
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概要
- 論文の詳細を見る
It was shown that the radiation collection system collecting the transmitted radiation through the specimen from the back side (i.e., the side opposite the surface struck by the electron beam) was effective for the formation of cathodoluminescent (CL) images in SEM. This system provided an image resolution of the order of the electron beam spot size (∿500Å) for a CaWO_4 crystal at an accelerating voltage of 20 kV. This collection system was also especially useful for the formation of spectroscopic CL images with a monochromator. The spectroscopic images of the mixed powder specimen of CaWO_4 and ZnS were obtained separately in consequence of differences in their characteristic spectral components.
- 社団法人応用物理学会の論文
- 1973-02-05
著者
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ISHIKAWA Akira
Department of Vascular Biology, Institute of Brain Science, Hirosaki University School of Medicine
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Mizuno Fumio
Department Of Electrical Engineering The National Defense Academy
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Mizuno Fumio
Department Of Electronics Faculty Of Engineering Nagoya University:(present Address) Nara Works Hita
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MARUSE Susumu
Department of Electronics, Faculty of Engineering, Nagoya University
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Maruse Susumu
Department Of Electronics Faculty Of Engineering Nagoya University
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Maruse Susumu
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Uchikawa Yoshiki
Department Of Electronics Faculty Of Engineering Nagoya University
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Uchikawa Yoshiki
Department Of Computational Science And Engineering School Of Engineering Nagoya University
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Uchikawa Yoshiki
Department Of Computational Science And Engineering Graduate School Of Engineering
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Ishikawa Akira
Department Of Disability And Health Hirosaki University Graduate School Of Health Sciences
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Ishikawa Akira
Department Of Electronics Faculty Of Engineering Nagoya University
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