2. RF放電中の電子エネルギー分布 (<小特集>電子エネルギー分布関数とプラズマプロセス)

概要

論文の詳細を見る
Some recent results of experiments regarding electron energy distribution function (EEDF) in capacitively (CCP)-and inductively (ICP)-coupled RF discharges detected by Langmuir probe are highlighted. The EEDF in Ar CCP varies from a bi-Maxwellian shape in low pressure to a Druyvesteyn-like shape in high pressure. The shape of the EEDF also includes a pd dependence due to the heating mode transition from the Joule heating at large pd to the stochastic one at small pd, where P is the gas pressure and d the electrode gap. The information on negative ion energy distribution function (NEDF) is also detected from the second derivative of the probe current in the electronegative gas discharges. The EEDF in Ar ICP varies from a bi-Maxwellian structure to a Maxwellian structure by increasing the plasma density. The second derivatives for a electronegative ICP, for example, O_2 and CF_4 ICP, show a Maxwellian structure.
社団法人プラズマ・核融合学会の論文
2001-07-25