最近のRF放電プラズマ研究の進展 : 電子エネルギー分布を中心として

概要

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Excited neutrals and positive and negative ions, all of which play a major role in the discharge of plasmas, are controlled by electron properties, a fact that suggests the importance of investigating for the electron energy distribution function (EDF). The EDFS detected in capacitively and inductively coupled radio-frequency (RF) plasmas (13.56 MHz) are dependent on the gas pressure, discharge current density (plasmas density) and discharge geometry. For example, the EDF in Ar RF discharges can be approximated by a bi-Maxwell distribution under the low pressure, while a Druyvesteyn one under the intermediate pressure. The distribution of high density is also Maxwellian due to the influence of the electron-electron collision process. Electron nonlocal kinetics are useful for explaining the spatially nonuniform plasmas by taking into account the potential due to the ambipolar diffusion. If the electron energy relaxation length is longer than the characteristic length of discharge, the nonlocal behavior is dominant, while the local one is dominant, if the length is shorter. This local or nonlocal kinetics contributes to understanding of the spatial variation of EDF.
社団法人プラズマ・核融合学会の論文
1997-07-25