SOFT MAGNETIC PROPERTIES OF NANOCRYSTALLINE Fe-Zr-C-N FILMS

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概要

• 論文の詳細を見る

• Soft magnetic properties of Fe-Zr-C-N films fabricated by rf reactive sputtering in Ar+N_2 atmosphere were investigated. The as-deposited films having mixd phases of amorphous and bcc α-Fe or mostly crystaEine α-Fe phase showed nanocrystalline structure upon annealing. The best soft magnetic properties achieved in these films are; H_c of 0.06 Oe, μ_<pff> of 3150 (1MHz) and 4πM_s of 16.8 kG. The films exilibited high μ_<pff> of more than 2000 and 4πM_s. of about 1.6 kG when the Zr content is about 6.4-8.3 at% and the [C+N] cdntent is around 15.5-18.0 at%. The fine grained α-Fe structure, together with very fine Zr(C,N) precipitates which were formed at an early stage of crystallization is considered to be one of the main factors for the excellent soft magnetic propertiesn

• 社団法人映像情報メディア学会の論文
• 1994-11-19

著者

• Kim H.j.

  Photonics Research Center Kist

• Han S.h.

  Magnetic Alloys Laboratory Korea Institute Of Science And Technology

• Ryu H.J.

  Department of Metallurgical Engineering, Seoul National University

• Choi J.O.

  Institute for Advanced Engineering

• Kim H.J.

  Magnetic Alloys Laboratory, Korea Institute of Science and Technology

• Lee J.J.

  Department of Metallurgical Engineering, Seoul National University

• Kang I.K.

  Magnetic Alloys Laboratory, Korea Institute of Science and Technology

• Lee J.j.

  Department Of Metallurgical Engineering Seoul National University

• Kang I.k.

  Magnetic Alloys Laboratory Korea Institute Of Science And Technology

• Ryu H.j.

  Department Of Metallurgical Engineering Seoul National University

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• The Cyclic Representation of q-Boson Algebra in Terms of Z^N Algebra
• ED2000-65 / SDM2000-65 Optical control of p-channel MODFET
• SOFT MAGNETIC PROPERTIES OF NANOCRYSTALLINE Fe-Zr-C-N FILMS
• Fe-Hf-C-N Films with High Permeability and Good Thermal Stability

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