A Knowledge Database on Thermal Control in Manufacturing Processes : Molding, Semiconductor Manufacturing, and Micro-Scale Manufacturing(<Special Issue>Emerging Fields in Thermal Engineering)
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概要
- 論文の詳細を見る
A prototype version of a knowledge database on thermal control in manufacturing processes, specifically, molding, semiconductor manufacturing, and micro-scale manufacturing has been developed. The knowledge database has search functions for technical data, evaluated benchmark data, academic papers, and patents. The database also displays trends and future roadmaps for research topics. It has quick-calculation functions for basic design. This paper summarizes present research topics and future research on thermal control in manufacturing engineering to collate the information to the knowledge database. In the molding process, the initial mold and melt temperatures are very important parameters. In addition, thermal control is related to many semiconductor processes, and the main parameter is temperature variation in wafers. Accurate in-situ temperature measurment of wafers is important. And many technologies are being developed to manufacture micro-structures. Accordingly, the knowledge database will help further advance these technologies.
- 一般社団法人日本機械学会の論文
- 2003-11-15
著者
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HIRASAWA Shigeki
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Satoh I
Department Of Mechanical And Control Engineering Tokyo Institute Of Technology
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Satoh Isao
Department Of Mechanical And Control Engineering Tokyo Institute Of Technology
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Hirasawa Shigeki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Satoh Isao
Department Of Mechanical And Control Engineering Graduate School Of Science And Engineering Tokyo In
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