TED-AJ03-KN3 KNOWLEDGE DATABASE ON THERMAL CONTROL IN MANUFACTURING PROCESSES : MOLDING, SEMICONDUCTOR MANUFACTURING, AND MICRO-SCALE MANUFACTURING
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概要
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We reports on an approach to produce a prototype version of a knowledge database on thermal control in manufacturing processes, especially the molding, semiconductor manufacturing, and micro-scale manufacturing processes. A knowledge database would provide the following advantages. (1) It would have a quick calculation function for basic design. (2) It would have a search function for technical data, academic papers, patents, commercial simulation programs, and research activities. Evaluated benchmark data would be available in the database and it would display trends and future roadmaps for research topics. (3) It would have a window where consultation is available on new problems. Figure 1 shows the contents and calculation-function pages for the prototype version of the knowledge database on thermal control in manufacturing processes that is currently being developed. A practical version of the database will be developed in 2003. This paper also summarizes present research topics and discusses future research on manufacturing engineering. In the molding process, the mold temperature is a very important parameter. Thermal control is related to many semiconductor processes, and the main parameter is the temperature distribution control. Many technologies are being developed to manufacture micro-structures. The potential for developing innovative technologies in micro-scale manufacturing is quite large. A knowledge database would help us to develop these technologies. The web address for the prototype version of the knowledge database is : http : //netsu-n.mep.titech.ac.jp/SATOH/AJ_KN3/databe.html.
- 一般社団法人日本機械学会の論文
著者
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HIRASAWA Shigeki
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Hirasawa Shigeki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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SATOH Isao
Tokyo Institute of Technology
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