Field Emission from Silicon Tips Coated with Diamond-like Carbon

概要

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We have coated the silicon field emission tips with diamond-like carbon(DLC). The array of tips was made of n-type silicon using conventional dry etch. Before DLC coating, the tips were bombarded with argon ion to clean the surface. We found that this bombardment improved the aspect ratio of the tips and the DLC adhesion to the silicon tips. The DLC film was coated using r.f. plasma assisted-CVD using C_6H_6 gas. Initially, the end of the tips was coated with ball-shape DLC. The current-voltage curve was measured in 10^<-6> Torr pressure. The DLC-coated tips emitted current at lower onset voltage than as-prepared silicon tips.
社団法人電子情報通信学会の論文
1995-10-24