The Crystallization and Hydrogenation Processes of Low Temperature Poly-Si Manufacture
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概要
- 論文の詳細を見る
Laser crystallization and hydrogenation technologies are the most critical processes in the manufacturing of low temperature poly-Si(LTPS)TFT's. In this paper, the effects of single-pulse laser beam profile on the crystallization of poly-silicon were investigated. In addition, the surface roughness of poly-Si films annealed by various laser-overlapping ratios was carried to verify the effects of laser beam profiles. Furthermore, the electrical characteristics of hydrogenated LTPS TFT's by H_2/Ar RF plasma or PECVD silicon nitride capping layer were also investigated as a function of the hydrogenation time.
- 社団法人電子情報通信学会の論文
- 2000-10-13
著者
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Wang L‐m
Industrial Technol. Res. Inst. Twn
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Shih Chu-jung
Electronics Research And Service Organization
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Lu I‐m
Industrial Technol. Res. Inst. Twn
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Chang Shih-Chang
ITRI)Taiwan
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Lu I-Min
Electronics Research and Service Organization
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Wu I-Wei
Industrial Technology Research Institute(ERSO
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Wang Li-Ming
Electronics Research and Service Organization Industrial Technology Research Institute
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Wane Li-Ming
Industrial Technology Research Institute(ERSO
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Chang Shih-Chang
Electronics Research and Service Organization Industrial Technology Research Institute
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Wu I-wei
Electronics Research And Service Organization/industrial Technology Research Institute(erso/itri)tai
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Wane Li-Ming
Electronics Research and Service Organization/Industrial Technology Research Institute(ERSO/ITRI)Taiwan
関連論文
- Advanced α-Si TFT Process Integration & Pixel Architecture (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
- Advanced a-Si TFT Process Integration & Pixel Architecture
- The Crystallization and Hydrogenation Processes of Low Temperature Poly-Si Manufacture (情報ディスプレイ--The 6th Asian Symposium on Information Display & Exhibition)
- Spectroscopic Analysis in Laser Annealing LT poly-Si TFTs (第5回日韓台中情報ディスプレイ合同研究会(ASID '99))
- Spectroscopic Analysis in Laser Annealing LT poly-Si TFTs
- The Crystallization and Hydrogenation Processes of Low Temperature Poly-Si Manufacture
- Effect of Parasitic Resistance on Mobilily in Laser Crystallized LT poly-Si TFTs (第5回日韓台中情報ディスプレイ合同研究会(ASID '99)) -- (TFT Technology for AM LCD)
- Effect of Excimer Laser Annealing Through Oxide (第5回日韓台中情報ディスプレイ合同研究会(ASID '99))
- Effect of Excimer Laser Annealing Through Oxide