High Efficiency 400dpi AIGaAs LED Array Fabrication for PMS (Polygon Mirror Scanning)
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概要
- 論文の詳細を見る
PMS is consist of LED array, lens, polygon-mirror, and motor. A PMS's light sources is the linear LED array. We have fabricated 400dpi LED array using GaAs/AlGaAs (A1〜0.65) single heterojunction structure. The problem of AlGaAs LED array is among the emitters. Thus, we have performed isolation bv RIE (Reactive Ion Etching) and wet etching. RIE experiments were carried out at room temperature and used in mixture of gases under a variety of etching conditions. The n and p ohmic contacts were made with AuGe/Ni/Au and AuZn/Pd/Au, respectively. The AlGaAs LED array showed good quality with low forward turn-on voltages and high brightness.
- 社団法人電子情報通信学会の論文
- 1999-03-18
著者
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Kim In
Korea University
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Kim I
Seoul National Univ. Seoul Kor
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Park Kwang
Korea Electronics Technology Institute, Electronics Devices Research Center
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Moon Hyun
Korea Electronics Technology Institute, Electronics Devices Research Center
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Moon Hyun
Korea Electronics Technology Institute Electronics Devices Research Center
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Kim In
Korea Electronics Technology Institute Electronics Devices Research Center
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Park Kwang
Korea Electronics Technology Institute Electronics Devices Research Center
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Kim In
Korea Advanced Institute Of Science And Technology
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