Mechanical Fracture of Piezoelectric Single Crystal Chip Resonator due to High Input Power(Special Issue on Current Electromechanical Devices and Their Materials with Recent Innovations)
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概要
- 論文の詳細を見る
Using LiTaO_3 and LiNbO_3 single crystals, we wish to miniaturize a powerful ultrasonic vibrator. We studied the method of measuring mechanical fractures of resonators with good reproducibility and collected data on mechanical fractures of crystals due to high input electric power. Chip resonators with a 4MHz and 8MHz shear mode were selected for the test samples. The driving frequency was swept near the resonance frequency, the duration time was short enough to raise the resonant vibrations and the driving voltage increased in one-volt increments. The method is free from unstable temperature increases. Values of the fracture limit for the driving current were measured and transformed to mechanical vibration velocities. These showed a nearly normal distribution. It was a surprise that concavity in the crater was observed at the center of the 16MHz LiNbO_3 resonator due to high input power. It was confirmed that the elastic fracture limit was latently very high for LiNbO_3 and LiTaO_3 single crystals.
- 社団法人電子情報通信学会の論文
- 2000-09-25
著者
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Okuda Takatoshi
Faculty Of Science And Engineering Ishinomaki Senshu University
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WAKATSUKI Noboru
Faculty of Science and Engineering, Ishinomaki Senshu University
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Wakatsuki Noboru
Faculty Of Science And Engineering At Ishinomaki Senshu University
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