Capacitive Pressure Sensor with Center Clamped Diaphragm (Special Issue on Micromachine Technology)
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概要
- 論文の詳細を見る
A new silicon capacitive pressure sensor with center clamped diaphragm is presented. The sensor has a silicon-glass structure and is fabricated by batch-fabrication processes. Since deformed diaphragm has a doughnut-shape, parallel-like displacement is realized and therefore better linearity of 0.7% which is half of the conventional flat diaphragm sensor is obtained. It is clarified both analytically and experimentally that the capacitive pressure sensor with center clamped diaphragm is advantageous in terms of linearity.
- 社団法人電子情報通信学会の論文
- 1997-02-25
著者
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Sato F
Faculty Of Information Shizuoka University
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OMI Toshihiko
Central R amp D Laboratory, Corporate Research and Development Headquarters, OMRON Corporation
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HORIBATA Kenji
Central R amp D Laboratory, Corporate Research and Development Headquarters, OMRON Corporation
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SATO Fumihiko
Central R amp D Laboratory, Corporate Research and Development Headquarters, OMRON Corporation
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TAKEUCHI Masashi
Central R amp D Laboratory, Corporate Research and Development Headquarters, OMRON Corporation
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Omi Toshihiko
Central R Amp D Laboratory Corporate Research And Development Headquarters Omron Corporation
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Horibata Kenji
Central R Amp D Laboratory Corporate Research And Development Headquarters Omron Corporation
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Takeuchi Masashi
Central R & D Lab. Omron Tateisi Electronics Co.
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Takeuchi Masashi
Central R Amp D Laboratory Corporate Research And Development Headquarters Omron Corporation
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