Fabrication Issues and fly-Height Modulation of Femto Sliders

概要

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As technology moves towards 600〜1000 Gb/in^2, the mechanical spacing between head-slider and disk media must be reduced from current level of 10〜12 nm to 3〜4 nm. Such reduction of the head-disk spacing will be accompanied with a lot new challenges. One of them is how to reduce the flying height modulation caused by the waviness of disk surface. Reducing slider size from its current pico level to femto level is considered as a promising approach for such a challenge. However, discussions on femto slider are still limited to theoretical analysis and computer simulation. This paper reports authors' efforts in the fabrication of such sliders and experimental analysis of the dynamic performance of such femto sliders. Results indicate that the femto slider is advantages in reducing flying height modulation caused by the waviness of disk surface. Investigations also extend to the study of flying performance sensitivity of femto slider to the parameter offset caused by manufacturing and integration processes. Results indicate that the flying performance of the femto slider is more sensitive to such offsets, especially the crown/camber offset, comparing with pico sliders. Efforts also extend to discussion of slider ABS designs which are less sensitive to crown/camber offset.
社団法人電子情報通信学会の論文
2002-11-01