OD-03 FABRICATION OF A ROTARY VERTICAL MICROMIRROR FOR OPTICAL SWITCHING
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概要
- 論文の詳細を見る
We demonstrate a novel rotary vertical micromirror for fiber-optic switching. A very simple fabrication process which uses SOI wafer and DRIE technology has been employed to micromachine this electrostatically actuated mirror. Based on this one-mask process, 2N-switch-architecture cross-connects with all the components, including optic fiber couplers, electrostatic comb drives and reflective vertical mirrors, has been integrally fabricated on a monolithic silicon substrate.
- 一般社団法人日本機械学会の論文
著者
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Liu Bo
Data Storage Institute
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Ling Shih
Nanyang Technological University School Of Mechanical And Production Engineering
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Du Hejun
Nanyang Technological University School Of Mechanical And Production Engineering
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HU Min
Nanyang Technological University School of Mechanical and Production Engineering
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