Functionalization of a Nonequilibrium RF Induction Plasma by Gas Mixtures

概要

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The present study describes the control characteristics of the gas temperature and velocity fields and also plasma parameters of RF induction argon nonequilibrium plasma by injecting a premixed cold hilium gas axially at atmospheric pressure. The flow and the gas temperature fields and the plasma parameters in the RF induction mixed gas plasma are obtained by solving the axisymmetric turbulent 2D MHD equations taking account of the variable transport properties of gas mixtures and using two-temperature model coupled with 2D Maxwell's equations. The mixing rate of a secondary injected gas is also evaluated using the species conservation equation. It is examined how the thermofluid and diffusion characteristics, the plasma parameters and the nonequilibrium degree in the RF induction plasma are influenced by the positions and the inlet mass fractions of injected helium gas. Finally, the calculated gas temperature taking account of the nonequilibrium effect shows good agreement with the previously obtained experimental data.
一般社団法人日本機械学会の論文
1998-05-15