Control Performance of Interactions between Reactive Plasma Jet and Substrate
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概要
- 論文の詳細を見る
When a nonequilibrium Ar/N2 plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuation of plasma jet.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-10-30
著者
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Chiba Genta
Institute Of Fluid Science Tohoku University
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Niikura Shota
Institute Of Fluid Science Tohoku University
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Takana Hidemasa
Institute Of Fluid Science Tohoku University
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Nishiyama Hideya
Institute Of Fluid Science Tohoku University
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Sato Takehiko
Institute Of Fluid Science Tohoku University
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Sato Takehiko
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Nishiyama Hideya
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Niikura Shota
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Chiba Genta
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Takana Hidemasa
Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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