Ba フェライト膜の磁気特性に及ぼすAIN下地膜の影響

概要

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Barium ferrite films were prepared by r.f. diode sputtering on AIN underlayers, whose influence on the films' c-axis orientation and magnetic properties was investigated. Hexagonal AIN underlayers with thicknesses of around 30-100 nm were deposited at room temperature. On the underlayers with a thickness of 30 nm, barium ferrite films with a thickness of 50 nm were deposited at room temperature. As the deposited barium ferrite films were not crystallized, they were post-annealed at temperatures between 600℃ and 900℃ for 5h in air. When the films were annealed at 800℃, superior perpendiculaly oriented films were obtained, exhibiting a saturation magnetization M_s of 203 emu/cm^3, a perpendicular coercivity H_<c⊥> of 5.5 kOe, a squareness ratio Sq_<⊥>/Sq_<⊥> of 2.7, and a coercivity ratio H_<c⊥>/H_<c⊥> of 1.6. This excellent uniaxial c-axis orientation lying perpendicular to the film surface may be presumed to result from the effect of the AIN underlayer.
社団法人日本磁気学会の論文
2000-04-15