3D Simulation of Thin Film Inductor using Permalloy as a Conductor

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概要

• 論文の詳細を見る

• Copper is generally used as a conductor in an air-core spiral thin film inductor. But the inductance of the air-core spiral inductor is very low. In order to improve the inductance, permalloy is used as a conductor in this simulation study. The inductance are 953 nH and 184 nH at 10MHz with permalloy conductor and copper conductor, respectively. The resistance of the inductor with permalloy conductor is larger than that of the inductor with copper conductor about ten times and the quality factors are 1.4 and 2.5 at 10MHz in the permalloy and copper coil inductor, respectively. Consequently, we propose the possibility of inductor using the permalloy as the conductor in 10 MHz rang.

• 社団法人日本磁気学会の論文
• 1999-01-20

著者

• Kim J.

  Dept. Of Obstetrics And Gynecology Yonsei University College Of Medicine

• Han S.

  Thin Film Tech. Research Center, Korea Institute of Sci. & Tech.

• Kim H.

  Thin Film Tech. Research Center, Korea Institute of Sci. & Tech.

• Kim J.

  Dept. Of Conservative Dentistry College Of Dentistry Chonbuk National University

• LEE J.

  Dept. of Nuclear Materials Technology Development, Korea Atomic Energy Research Institute

• Kim H

  Thin Film Tech. Research Center Korea Institute Of Sci. & Tech.

• Kim J.

  Digital Media R&d Center Samsung Electronics Co. Ltd.

• Ryu H.

  Dept. of Metallurgical Eng., Seoul National University

• Lee J.

  Dept. Obst & Gynec. Yamagata Univ. Sch. Med.

• Han S

  Thin Film Tech. Research Center Korea Institute Of Sci. & Tech.

• Lee J.

  Dept. Of Metallurgical Engineering Seoul National University

• Kim J.

  Dept. Of Bioresource Sciences Andong Univ. Korea

• Ryu H.

  Dept. Of Metallurgical Eng. Seoul National University

• Ryu H.J.

  Dept. of Metallurgical Eng., Seoul National University

• Lee J.J.

  Dept. of Metallurgical Eng., Seoul National University

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