磁性体薄膜の微細加工

概要

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Microfabrication techniques for magnetic materials will open a new field of research and application of magnetic materials, and will become a crucial process for future magnetic devices which include high-density magnetic recording heads, high-density patterned media, magnetic quantum devices, micromagnetic devices, etc. The microfabication technique consist of the process of pattern definition, e.g. electron-beam writing, followed by the process of the pattern transfer. Critical issues of the microfabrication process for magnetic materials is the pattern trasfer technique of the reactive-ion etching. This paper reviews the recent advance of the microfabrication for the magnetic materials. An emphasis is given to the reactive-ion etching methods that has been tried in the past experiments and that has been newly developed in recent experiments.
社団法人日本磁気学会の論文
1998-11-01