熱膨張係数の大きいSUS304ステンレス鋼シャフトと圧縮性内部応力を有するNi-Feスパッタ膜で構成した磁歪式トルクセンサの出力値に及ぼす要因

概要

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The sputtering technique was used to prepare 81-100 wt% Ni-Fe magnetostrictive films with compressive internal stresses on a SUS304 stainless steel shaft with large thermal expansion coefficient. The factors affecting the output characteristics of torque sensors are studied as functions of the shape of the sputtering pattern and the compositions and internal stresses of the Ni-Fe films. The sensitivity of a torque sensor is proportional to the film thickness. The optimal value of the Ni content of Ni-Fe films was found theoretically and experimentally in order to realize maximum sensitivity in torque sensing. Further, the effect of stress-relief annealing on the sensitivity of the torque sensors is discussed in conjunction with the internal stress of Ni-Fe films.
社団法人日本磁気学会の論文
1998-09-01