Fe系軟磁性膜の腐食機構の解析とそれを用いた高信頼性磁気ヘッドの開発

概要

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The microstructure, magnetic characteristics, and corrosion resistance of Fe-based soft magnetic thin films developed for digital VTR and data streamer applications are studied. Al-doped Fe-Ta-C films, whose saturation magnetic flux density, B_s value is 1.3 T, consist of microcrystalline grains. The corrosion resistance of an Al-doped Fe-Te-C film depends on the [Ta]/[C] ratio and Al concentration. A film with a [Ta]/[C] ratio between 0.5 and 0.7 with 9.8 at% added Al has high corrosion resistance. The crystalline grain sized of Fe and TaC particles in this film were 10 and 3 nm, respectively. Control of these crystalline grain size is important for realizing useful soft magnetic characteristics as well as high corrosion resistance.
社団法人日本磁気学会の論文
1998-04-01