MN-06 MEMBRANE MICROCANTILEVER ARRAYS FABRICATION WITH PZT THIN FILMS FOR NANORANGE MOVEMENT
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概要
- 論文の詳細を見る
In order to solve the over etching problem which leads to low production yield in the microcantilever process, a new fabrication process by using DRIE etching of silicon from the front side of the silicon wafer has been developed. Silicon free membrane microcantilever with Lead Zirconate Titanate (PZT) thin films 1 to 2 μm in thickness have been successfully fabricated with 100% yield by this new process. Annealing temperature is critical to the property of the PZT film prepared by sol-gel method.
- 一般社団法人日本機械学会の論文
著者
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Zhu Weiguang
Microelectronics Center School Of Electrical And Electronic Engineering Nan Yang Technological Unive
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Zhu Weiguang
Microelectronics Centre School Of Electrical And Electronic Engineering; Nanyang Technological Unive
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Wang Zhihong
Microelectronics Center School Of Electrical And Electronic Engineering Nanyang Technological Univer
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Wang Zhihong
Microelectronics Centre School Of Electrical And Electronic Engineering; Nanyang Technological Unive
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Zhu Hong
Micromachines Centre School Of Mechanical And Production Engineering
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MIAO Jianmin
Micromachines Centre, School of Mechanical and Production Engineering
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CHEN Bangtao
Micromachines Centre, School of Mechanical and Production Engineering
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Miao Jianmin
Micromachines Centre School Of Mechanical And Production Engineering
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Chen Bangtao
Micromachines Centre School Of Mechanical And Production Engineering
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Zhu Hong
Microbiology And Epidemiology Institute Academy Of Military Medical Science
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- MN-06 MEMBRANE MICROCANTILEVER ARRAYS FABRICATION WITH PZT THIN FILMS FOR NANORANGE MOVEMENT