Low Temperature Processing of Nanocrystalline Lead Zirconate Titanate (PZT) Thick Films and Ceramics by a Modified Sol-Gel Route

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概要

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• Dispersing fine particles into a sol-gel matrix is a promising process to get a thick 0-3 composite coating layer. In this paper, we have further improved this modified sol-gel process by nanocrystalline composite technique to realize the low temperature annealing. Dense Pb(Zr, Ti)O_3 (PZT) thick films of 10 to 50 μm in thickness have been obtained on the platinum-coated silicun substrates by spin-coating at sintering temperature of 600-700℃ and fully developed submicron-sized grains have been demonstrated in screen-printing piezoelectric films on alumina substrates at sintering temperature of 700-800℃. The dependence of various properties such as micrustructure, crystallization, ferroelectric and dielectric properties of such made thick films on the processing parameters have been investigated. For a 10 μm-thick film spin-coated on silicon wafer, the dielectric loss and relative permittivity are 0.010 and 1024, respectively, at I kHz. The remanent polarization (P_r) and the coercive field (E_c) are 13.6 μC/cm^2 and 34.5 kV/cm, respectively. Obviously, such made thick film has comparable properties with bulk PZT ceramic. This novel technique can be extensively used in sol-gel, screen-printing, tape-casting, even in traditional ceramic process to reduce the process temperature.

• 社団法人応用物理学会の論文
• 2002-11-30

著者

• Tan Kiang

  Microelectronics Center School Of Electrical And Electronic Engineering Nan Yang Technological Unive

• Zhu Weiguang

  Microelectronics Center School Of Electrical And Electronic Engineering Nan Yang Technological Unive

• Wang Zhihong

  Microelectronics Center School Of Electrical And Electronic Engineering Nanyang Technological Univer

• ZHAO Changici

  Microelectronics Center, School of Electrical and Electronic Engineering, Nan yang Technological Uni

• HNG Huey

  School of Materials Engineering, Nanyang Technological University

• Hng Huey

  School Of Materials Engineering Nanyang Technological University

• Zhao Changici

  Microelectronics Center School Of Electrical And Electronic Engineering Nan Yang Technological Unive

• Zhao Changlei

  Microelectronics Center, School of Electrical and Electronic Engineering, Nan yang Technological University

関連論文

• Rotary Multilayer Split Morph-A Piezoelectric Microactuator for Dual-Stage Actuation Systems in High Track Density Hard Disk Drives
• Low Temperature Processing of Nanocrystalline Lead Zirconate Titanate (PZT) Thick Films and Ceramics by a Modified Sol-Gel Route
• MN-06 MEMBRANE MICROCANTILEVER ARRAYS FABRICATION WITH PZT THIN FILMS FOR NANORANGE MOVEMENT

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