Rotary Multilayer Split Morph-A Piezoelectric Microactuator for Dual-Stage Actuation Systems in High Track Density Hard Disk Drives

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概要

著者

Yao Xi
Microelectronics Center School Of Electrical And Electronic Engineering Nanyang Technological Univer
Tan O
Nanyang Technological Univ. Singapore
WANG Zhihong
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological Univ
ZHU Weiguang
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological Univ
TAN Ooi
Microelectronics Center, School of Electrical and Electronic Engineering, Nanyang Technological Univ
Tan Ooi
Microelectronics Center School Of Electrical And Electronic Engineering
Zhu Weiguang
Microelectronics Center School Of Electrical And Electronic Engineering Nan Yang Technological Unive
Wang Zhihong
Microelectronics Center School Of Electrical And Electronic Engineering Nanyang Technological Univer

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