MN-07 Development of 3-D Electrostatic Microactuator for Hard Disk Drives

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概要

• 論文の詳細を見る

• High-bandwidth and high-accuracy servo actuation of the recording head is necessary for the future high areal density of hard disk drives (HDD). A 3-D electrostatic microactuator for dual-stage servo system of HDD has been developed in this paper. Parallel-upstanding comb drives are utilized, and interlapped-L flexures are introduced for the microactuator, which make the actuator a thick 3-D structure with a high aspect ratio. The 3-D microactuator is fabricated in a bulk silicon wafer bonded to a Pyrex glass substrate by using MEMS technologies, and it is assembled between the slider and suspension's gimbal. Simulated model has predicted the 0.58-μm displacement and 2.1-kHz resonant frequency of the microactuator with a low driving voltage of 30V.

著者

• Zhu Hong

  Micromachines Centre School Of Mechanical And Production Engineering

• CHEN Bangtao

  Nanyang Technological University

• MIAO Jianmin

  Nanyang Technological University

• ZHU Hong

  Nanyang Technological University

• MIAO Jianmin

  Micromachines Centre, School of Mechanical and Production Engineering

• Miao Jianmin

  Micromachines Centre School Of Mechanical And Production Engineering

• Chen Bangtao

  Micromachines Centre School Of Mechanical And Production Engineering

関連論文

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• MN-07 Development of 3-D Electrostatic Microactuator for Hard Disk Drives
• MN-06 MEMBRANE MICROCANTILEVER ARRAYS FABRICATION WITH PZT THIN FILMS FOR NANORANGE MOVEMENT

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