Self-Excited Vibrations of Wire-Winding-Type Growing Apparatus for Silicon Single Crystals : Experimental Results and Considerations Relevant to Self-Excited Vibrations

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概要

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• In order to minimize the height of a wire-winding-type growing apparatus for silicon single crystals, a wire-rope winding method or a ball-chain winding method is used instead of a stiff shaft pulling a single crystal. When the wire-rope or the ball-chain rotates, amplitudes of the whirling vibration increase gradually with time, and a self-excited vibration occurs. In this paper, the cause of this self-excited vibration is studied experimentally using a model of the wire-winding-type growing equipment for silicon single crystals. The self-excited vibration of a wire-rope occurs when the rotation is above a resonant speed of the wore-rope system, and then only the forward whirling of a wire-rope becomes unstable, independent of the direction of an initially added whirling. On the basis of the experimental results, it is clarified that self-excited vibrations of silicon single crystal growing apparatus are due to an internal friction among element wires of the rope.

• 一般社団法人日本機械学会の論文
• 1989-12-15

著者

• OTA Hiroshi

  Faculty of Engineering, Nagoya University

• MIZUTANI Kazuki

  Faculty of Engineering, Mie University

• Mizutani Kazuki

  Faculty Of Engineering Mie University

• FUJITA Takashi

  Mitsubishi Electric Corporation Kobe Works

• Ota Hiroshi

  Faculty Of Engineering Nagoya University

• Ota Hiroshi

  Faculty Of Engineering Gunma University

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