103 オンデマンド型ヘッドロードアンロード方式によるアクティブ制御スライダのPZT薄膜マイクロアクチュエータの開発(情報機器コンピュータメカニクス1 : ヘッド・ディスク・インタフェース)

概要

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This paper describes the development of novel PZT thin films for active sliders in magnetic hard disk drives. The feature for novel PZT thin films is that sol-gel thin films are deposited on sputtered PZT thin films fabricated on bottom Pt/Ti electrodes. Therefore, the novel PZT thin films consist of a thermal SiO_2 layer and the sputtered and sol-gel PZT thin films layers sandwiched with upper Pt and bottom Pt/Ti electrodes on a Si slider material. Fabricating the diaphragm microactuator, the piezoelectric properties for the novel composite PZT thin films are studied. As a result, the piezoelectric strain constant d_<31> is identified to be 130×10^<-12>m/V. This value is higher than conventional monolithic PZTthin films and it is found that the novel PZT thin films have the good piezoelectric properties. This suggests the feasibility of realizing active sliders operating at lower voltage under about 10V.
一般社団法人日本機械学会の論文
2001-03-23