1217 PZT薄膜の合成とHDD用マイクロアクチュエータへの応用(GS-15 ロボティクス・メカトロニクス)

概要

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This paper describes a novel approach for nano spacing or contact recording technology in magnetic recording disk storage, we propose micromachined thin film PZT microactuators that control the friction force in head/disk interface. For preparation of this microactuators, we develop sol-gel derived PZT thin films Using this developed sol-gel process, we obtain highly <111> oriented PZT thin films, and they exhibited better ferroelectric properties. The PZT thin films showed well-saturated hysteresis loop at an applied voltage of 5[V] with P_r, E_c of 15[μC/cm^2] and 21[kV/cm]. Futher, we fabricate micro machined cantilevers and diaphragm structures with PZT thin films and evaluate the piezoelectlic microactuator characteristics/
一般社団法人日本機械学会の論文
2000-03-16