A-24 マイクロマテリアルの破壊特性評価とナノフラクトグラフィ

概要

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This paper describes the micromechanical testing of small microelements of the order of μm and the application of an atomic force microscope to evaluate the nanoscopic damage, i. e., nanofractography. The testing methods showed are micromechanical bending and/or tensile tests to evaluate the mechanical properties and the fracture strength of a microelement. Attention is also paid to the fatigue behavior and the effects of nm-deep notch and environments on the fracture strength of a microelements : in a microcomponent; the surface-to-volume ratio increases with a decrease in the size of the component, and therefore, the surrounding environment sometimes decreases the mechanical properties. Besides these, , microelements are of the order of μμm, and therefore, the damage that causes fracture and degradation in strength is in extremely localized small areas, compared with traditional mm-sized mechanical parts. Therefore, higher magnification, or nanometric surface damage evaluation, for example using an atomic force microscope (AFM), is required, instead of traditional μm-order damage evaluation by e. g., a scanning electron microscope. The importance of the use of an AFM, or nanofractography is demonstrated.
社団法人日本機械学会の論文
2000-03-29