分子線と表面の相互作用に関する研究 : 表面モデルの提案とシミュレーション

概要

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In this study, a new computational modeling of the gas-surface interaction is proposed to explain experimental results of the scattering of gas molecules from solid surfaces, especially engineering surfaces. The characteristic feature of the model is to settle the collision layer and the adserbed gas layer, involving surface molecules and adsorbed molecules, respectively. Incident molecules experience force due to the gas-solid potential gradient, and change their trajectories which is computed by the molecular dynamics method. The gas molecules are scattered from the surfaces after collisions with surface or adsorbed molecules. The examined characteristics are compared with the experimental results : flux distributions, TOF spectra and the average energy of scattered molecules.
一般社団法人日本機械学会の論文
1994-01-25