分子線による真空材料の評価 : 第1報,気体分子とステンレス表面の干渉

概要

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Using the molecular beam method, scattering of argon and helium molecules from a stainless steel surface (SUS304) is studied experimentally. Time-of-flight (TOF) spectra corresponding to the velocity distribution of the scattered molecules are measured at various angles of reflection (15〜85°). Surface temperature is varied from 286 K to 723 K and angle of incidence from 45° to 75°. The TOF spectra are analyzed by means of superposition of two spectra : one corresponding to the elastic or inelastic scattering process and one to the adsorption and desorption process. Absence of the first process is verified for Ar beam, showing a large accommodation coefficient. On the other hand, the TOF spectrum of He beam at low temperature is analyzed adequately by the two processes. Accommodation coefficients, mean energy of the scattered molecules, and flux distributions are calculated from the TOF spectrum.
一般社団法人日本機械学会の論文
1993-04-25