光集積化浮上量センサとその特性

概要

論文の詳細を見る
As technology improves, the spacing between magnetic disks and magnetic heads continues to decrease. Typical spacing measurements are based on interferometry, in which the magnetic disk is usually replaced with a glass disk. However, this method cannot be used to measure the spacing between a real magnetic disk and a ceramic slider. In order to measure this spacing, we develop a new spacing sensor based on "frustrated total reflection". The sensor is optically integrated into a glass slider. However, the sensor is so small and light that it has the least possible effect on the behavior of the slider. Then spacing measurements are performed between a magnetic disk and the glass slider. This sensor shows potential for use with real sliders.
一般社団法人日本機械学会の論文
1994-08-25