磁気ヘッド絶縁膜を光導波路として用いた全反射型スライダ浮上量センサ

概要

論文の詳細を見る
As technology improves, the spacing between magnetic disks and magnetic heads continues to be reduced. A typical spacing measurement method is based on interferometry, in which the magnetic disk is usually replaced by a glass disk. Therefore, this method cannot be used to measure the spacing between a real magnetic disk and a ceramic slider. In order to measure this real spacing, we have developed a new spacing sensor based on "Frustrated Total Reflection". We fabricated the sensor on a ceramic slider using the magnetic head insulation layer as a waveguide. To evaluate the performance of the new sensor, we used it to measure the spacing between a glass disk and a ceramic slider, using a typical interferometry method. The results agreed with each other within an error of 5 nm. The sensor shows potential for use with a real magnetic slider.
一般社団法人日本機械学会の論文
1997-05-25