パラレルルーバブラインド形クライオポンプの排気速度 : 多段の平行パネルを有するポンプの水素排気速度

概要

論文の詳細を見る
As a new type of actual-sized cryopump with high pumping speed, a parallel-louvre-blind type cryopump of a rectangular cross section with opening distance B, width C and depth D, is proposed and is produced as a trial pump unit designed as actual size. The influence of pump depth size ratio R_d(=D/B) and number of secondary cryopanels on the transmission Probability P_<bc> of the pump unit is calculated by Monte Carlo simulation, and the hydrogen pumping speed is measured by experiments. The following results are obtained. (1) The transmission probability of a cryopump designed with dimensional ratio of R_d=1.3 is calculated to be 0.66 at ratios of R_c(=β/C)=0.88, which means that hydrogen pumping speed of cryopumps of this size can attain 294 m^3・s^<-1>/m^2 per opening area. (2) The real hydrogen pumping speed of the trial pump unit with 30 secondary cryopanels is measured as 295m^3・s^<-1>/m^2.
社団法人日本機械学会の論文
1993-05-25