セラミックスベアリングインナーレース面の総形鏡面研削

概要

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In this paper, we consider the cross-sectional profile accuracy of both a trued wheel and a ground workpiece. The Arc Truer is a truing/dressing device designed for a superabrasive grinding wheel with a convex profile. The truer has the advantages of obviating dressing after truing, and of producing sharp cutting edges that protrude from the wheel surface. Some kinematic errors, called alignment errors, of the Arc Truer have been analyzed, and the influence of the errors on the wheel profile has been clarified. An ultraprecision cylindrical grinding machine equipped with a hydrostatic wheel spindle and a fine infeed mechanism driven by piezoelectric actuators has been specially developed for mirror grinding using extremely fine grit wheels. Finally, a mirror surface on a Si_3N_4 ring with a roughness of less than 50 nm R_<max> and a profile error of less than ±μm was obtained using a # 5000 mesh-size diamond wheel.
一般社団法人日本機械学会の論文
1997-08-25