Si単結晶マイクロエレメントの破壊・疲労特性評価と水環境効果

概要

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Quasi-static and fatigue tests of single-crystal silicon microelements fabricated by micromachining (photoetching) were performed. The cantilever-beam microelements were subjected to simple bending using a specially designed testing machine. Extremely small loads could be applied to a microelement by means of an electromagnetic actuator, and quasi-static and fatigue tests could thereby by performed with sufficient precision. Silicon microelements deformed elastically until final catastrophic failure, giving a brittle nature. The fracture strengths increased with decreasing specimen size. Fatigue tests were performed, and the influence of water on fatigue strength was discussed. The fracture surface and sample surface were examined in detail using a scanning electron microscope (SEM) and an atomic force microscope (AFM), and the fracture mechanisms were discussed.
社団法人日本機械学会の論文
1996-04-25