ぜい性破面のSEM/STM/AFMによる三次元定量解析

概要

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This paper describes a quantitative fractographic technique using scanning electron microscopy (SEM) and scanning probe microscopy (SPM) of scanning tunneling (STM) and atomic force microscopes (AFM). The techniques quantitatively evaluate the three-dimensional shapes of fracture surfaces. For the technique using SEM, software based on supercomputer, image processing and pattern recognition technique, is applied to a pair of stereofractographs, and a three-dimensional shape is reconstructed. The STM and AFM techniques evaluate surface topography on the nanoscopic order. From the obtained three-dimensional shapes of brittle cleavage or intergranular fracture surfaces of steels, ceramics and single crystalline silicon, surface area ratio, fracture roughness and profile roughness parameters were computed with various scanning areas and measuring units. Attention was also paid to a fractal nature of a fracture surface ; the relationships between ductility and three-dimensional parameters, and nanoscopic fracture morphology were discussed.
一般社団法人日本機械学会の論文
1995-07-25