Tic,TiN,TiCN,TiCON,CVDコーティング膜の水熱酸化腐食

概要

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Wet corrosion by high temperture-high pressure water has been studied on CVD coated Ti base ceramic fims (thickness ca. 10 μm,TiC,TiN,TiC_<0.3>N<0.7>,TiC_<0.3>N_<0.7>O_<0.1>) at 300〜680℃ under 100 Mpa for 2h.The order of corrosion resistance was obtained as TiN>TiCN>TiCNO>TiC from the X-ray diffraction analysis of scale layers and the reaction ratio calculated from the weight gain.The order was discussed on the volume ratio φ defined by Pilling-Bedworth, the internal stress within the coated films, and the dissolution behavior of gaseous species at the interface of ceramic film-oxide scale. The oxide scale crystallized as anatase in TiC and transformed into rutile at higher temperatures. On the other hand,rutile deposited directly in other samples having a higher corrosion resistance.
社団法人日本材料学会の論文
1993-07-15