水熱電気化学法によるチタン堆積ガラス基板上へのチタン酸バリウム薄膜の調製

概要

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Well-crystallized polycrystalline barium titanate thin films have been prepared at sufficiently low temperatures by the hydrothermal-electrochemical reaction on titanium-deposited glass substrates. The reaction was carried out in 0.1-0.5 N Ba(OH)_2 solutions at temperatures of 100°-200℃ and under saturated vapor pressures, using a titanium-deposited glass substrate for anode and a Pt plate for cathode and applying an electric current galvanostatically up to 18 mA/cm^2 . The BaTiO_3 film was lustrous and dense. The thickness of the film estimated from the weight change increased from 70 to 300 nm with treatment time from 10 to 60 min at 200℃ in 0.5 N Ba(OH)_2 Solution with the current density of 15 mA/cm^2. The adhesion of the BaTiO_3 film to the glass substrate was so strong that no exfoliation was observed. Similar BaTiO_3 thin films with thickness less than 70 nm were formed under hydrothermal conditions without electricity.
社団法人日本セラミックス協会の論文
1990-08-01