アルミナセラミックコーティング薄膜における破壊起点の観察と強度評価

概要

論文の詳細を見る
Fracture strength of amorphous insulating aluminum oxide ceramic thin film coated on a Fe-42%Ni base metal was investigated under static loadings by using four point bending apparatus. It was found that the static fracture strength of thin film decreased with increasing coating thickness. Observations in detail by optical and scanning electron microscopes revealed that splash particles deposite in the coating process became creack initiation origins. It was also found that a large number of big splash particles in the thick films reduced the fracture strength with increasing thickness of film. An evaluation method of fracture strength of thin film was discussed based on the fracture mechanics approach and the critical value of strain intensity factors for fracture was found to be almost constant regardless of the film thickness and processing lot of materials.
1992-11-15