マイクロ波プラズマを用いたガス蒸発法による窒化物超微粒子の生成(<小特集>粉体小特集)

概要

論文の詳細を見る
A new preparation method of high-purrity ultrafine nitride particles was demonstrated by applying the low temperature plasma induced by 2.45 GHz microwaves to the gas evaporation technique. Ultrafine Al, fe and Si particles produced by the evaporation of these metals in a low pressure N_2 gas condition were nitrided by passing them through the nitrogen plasma region. From the electron deffraction, the following nitride phases were recognized as A1N, γ-Fe(solid solution of nitrogen), γ-Fe_4N, ε-Fe_xN(2<x≦3), ζ-Fe_2N, α-Si_3N_4. The formation of these phases depended mainly on three factors: N_2 gas pressure, the gas velocity at the plasma region and the microwave power. The preferable conditions of these factors for preparing pure nitride particles were investigated. For example, the particles formed at the condition of 7 Torr in N_2 pressure, 1m/sec in gas velocity and 1.2kW in microwave power consisted sompletely of nitrides of the staring material evaporated. In the cases of Fe-N and Si-N systof those nitride phases was formed generally. Particles tended to grow in the plasma region. The particle size of nitrides ranged from 20 to 300nm, which was found to be larger by a factor of 5 to 10 than that of particles collected at the front of the plasma region.
社団法人日本材料学会の論文
1987-11-15