有機沈殿法による繊維強化多孔質セラミック複合セッターの作製とその熱衝撃挙動

概要

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Fiber reinforced ceramic composite setter was produced by Organic Flocculating Method. Its mechanical and thermal properties were studied. Air-quenching method, combined with theoretical analysis of thermal shock behavior, was employed to determine the bending strength drop of the composite setter and the critical temperature of composite setter with different fiber contents after thermal shock. Results from airquenching method show that the drop of bending strength after suffered thermal shock becomes severe with increasing fiber content in the composite setter. Phase transformation to cristobalite within 200-300℃ temperature range was accompanied by abnormal thermal expansion and it is considered to contribute to the low thermal shock resistance of composite setters with high fiber content.
社団法人日本セラミックス協会の論文
2003-01-01