低酸素含有ポリボロシラザンの合成と熱分解

概要

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Polyborosilazane with a low oxygen content was synthesized by reacting perhydrosilazane with tris (dimethylamino) borane. The chemical structure of this polymer was investigated by infrared and nuclear magnetic resonance spectroscopies. The borazine ring structure was observed in the polymer. Amorphous silicon nitride was obtained by pyrolysis of this polymer in a stream of N_2 at 1000℃ with about 80 mass% ceramic yield. The pyrolysis product remained amorphous after further heating to 1700℃ under N_2. The oxygen content in the pyrolysis product was 1.1 mass%' Crystallization to β-Si_3N_4, β-SiC and α-Si_3N_4 took place on annealing in N_2 at 180℃ for 1h. These results indicate that this polyborosilazane is a good precursor for amorphous silicon nitride-based materials with low oxygen content.
社団法人日本セラミックス協会の論文
1996-05-01