窒化ケイ素基セラミックスの超高真空中破壊試験時に放出されるガス成分の検出

概要

論文の詳細を見る
Three types of Si_3N_4-based sintered ceramics were fractured in an ultra-high vacuum and the gases generated during the fracture were analyzed by quadrupole mass spectroscopy. Various gases such as H_2, CH_4, N_2, CO, Ar and CO_2 were detected after the fracture event in all the materials. The emission peak intensities of the gases and the total pressure changes in the chamber depended on the types of materials, but the gas compositions were similar to each other. These gases are thought to be released mainly from residual pores formed during sintering. Some of the gases may be produced at the moment of fracture. This method is expected to be applied to fundamental studies on the processing and fracture of advanced ceramics.
社団法人日本セラミックス協会の論文
1997-10-01