ブレンド前駆体の熱分解によるSi-AI-N-Cセラミックコンポジットの作製(<ゲストエディターによる特集>有機-無機変換プロセス)

概要

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Si-Al-N-C precursors have been prepared from perhydropolysilazane (PHPS) and cage-type poly (ethyliminoalane) [(HAlNEt)_n; PEIA, n is mainly 8] with different Si/Al molar ratios (Si/Al=3, 1, 1/3). Spectroscopic analysis indicates that essentially no Si-N-Al linkages form, indicating that the precursors are blended polymers. TG analysis reveals that the ceramic yields of the blended precursors up to 900℃ are higher than those of PHPS and (HAlNEt)_n, suggesting that cross-linking reactions occur during pyrolysis. Possible reactions are dehydrocoupling and radical reactions, as suggested by the results of solid-state nuclear magnetic resonance (NMR) spectroscopy. The results of solid-state NMR spectroscopy and X-ray diffraction (XRD) analysis indicate that the residue pyrolyzed at 1600℃ contains mainly crystalline AlN, 2H-SiC and β-SiC.
社団法人日本セラミックス協会の論文
2006-06-01