QUANTITATIVE EVALUATION OF PINHOLE DEFECTS IN TiN FILMS PREPARED BY R.F. REACTIVE SPUTTERING(Special Issue on Hierarchical Estimations of Materials Strength)
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概要
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Pinhole defects of TiN-coated stainless steels were evaluated potentiodynamically in a deaerated 0.5kmol/m^3 H_2SO_4+0.05kmol/m^3KSCN solution at 298K. The TiN films prepared by radio frequency(r.f.)reactive sputtering exhibited the columnar structure with the preferential<220>or<111>orientation, and they contained more or less pinhole defects. The critical passivation current density i_<crit> in the TiN-coated specimens decreased considerably with increasing film thickness. Above 1.5μm in thickness, however, there was an increasing tendency in i_<crit> with cracking and/or peeling. The area ratio of pinhole defects was evaluated by the ratio of i_<crit> of a coated and a non-coated specimen. The result coincided comparatively well with the true defect area ratio based on the optical micrographs before and after anodically polarized. Such electrochemical method was concluded to be a reliable evaluation technique for the pinhole defects of corrosion-resistive coating.
- 社団法人日本材料学会の論文
- 1999-12-15
著者
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Inoue Shozo
Mechanical And System Engineering Himeji Institute Of Technology
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Inoue Shozo
Department Of Electronics Chiba Institute Of Technology
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Koterazawa Keiji
Department of Mechanical and System Engineering, University of Hyogo
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Koterazawa Keiji
Mechanical And System Engineering Himeji Institute Of Technology
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Uchida Hitoshi
Department Of Mechanical Engineering Faculty Of Engineering Himeji Institute Of Technology
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Uchida Hitoshi
Department Of Applied Chemistry Graduate School Of Engineering Nagoya Institute Of Technology
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NAKANO Yasuhide
Graduate School of Engineering, Himeji Institute of Technology
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Nakano Yasuhide
Graduate School Of Engineering Himeji Institute Of Technology
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